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Effect of hydrogen on hot electron energy relaxation in SiO2 and Si3N4 films

โœ Scribed by D.G. Esaev; V.M. Efimov; A.A. Shklyaev


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
490 KB
Volume
221
Category
Article
ISSN
0040-6090

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