Optical thickness measurement of SiO2–Si3N4 films on silicon : F. Reizman and W. Van Gelder, Solid-St. Electron.10 (1967), p. 625.

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 105 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90129-1