Determination of Composition and Inhomogeneity in GaAs1−xPx Epitaxial Layers

✍ Scribed by M. Somogyi; Á. Barna

• Publisher: John Wiley and Sons
• Year: 1974
• Tongue: English
• Weight: 143 KB
• Volume: 9
• Category: Article
• ISSN: 0232-1300
• DOI: 10.1002/crat.19740091017

✦ Synopsis

Abstract

A method is given for the rapid determination of the composition and the carrier concentration in GaAs~1−x~P~x~ epitaxial layers. The composition was determined from the photoresponse of the Schottky‐barriers. A calibration curve was constructed using the absolute composition data determined by microprobe analysis. The concentration values were obtained from the usual C‐V dependence.