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Cathodoluminescence and Al Composition of Biaxially Stressed AlGaN/GaN Epitaxial Layers

โœ Scribed by Lee, In-Hwan ;Park, Y.


Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
137 KB
Volume
192
Category
Article
ISSN
0031-8965

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โœ Paduano, Q. ;Weyburne, D. ;Wang, S-Q. ๐Ÿ“‚ Article ๐Ÿ“… 2001 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 86 KB ๐Ÿ‘ 1 views

The alloy composition and the residual stress in Al x Ga 1--x N on GaN epi-layers can be estimated by measuring both the a-axis and c-axis lattice constants using HRXRD. Using linear elastic theory, we derive the alloy composition of a biaxial strained layer from a simple equation relating the measu