✦ LIBER ✦

Deterioration of aluminum induced crystallization of sputtered silicon by film stress

✍ Scribed by Ching-Ming Hsu; Ming-Chang Yu

Book ID: 111546783
Publisher: Springer
Year: 2003
Tongue: English
Weight: 216 KB
Volume: 22
Category: Article
ISSN: 0261-8028
DOI: 10.1023/a:1024982723808

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Study on amorphous silicon thin film by

Study on amorphous silicon thin film by aluminum-induced crystallization

✍ Minghua Li; Yong Liu; Yanghuan Lin; Xiaofeng Guo; Ruijiang Hong; Hui Shen 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 301 KB

Thermoelectric effect of silicon films p

Thermoelectric effect of silicon films prepared by aluminum-induced crystallization

✍ Qing-run Hou, Bing-fu Gu, Yi-bao Chen, Yuan-jin He 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 531 KB

The effects of hydrogen on aluminum-indu

The effects of hydrogen on aluminum-induced crystallization of sputtered hydrogenated amorphous silicon

✍ Maruf Hossain; Husam H. Abu-Safe; Hameed Naseem; William D. Brown 📂 Article 📅 2006 🏛 Springer US 🌐 English ⚖ 127 KB

Polycrystalline Silicon–Germanium Films

Polycrystalline Silicon–Germanium Films Prepared by Aluminum-Induced Crystallization

✍ Qi, Jing; Yang, Yang; He, Deyan 📂 Article 📅 2008 🏛 The Electrochemical Society 🌐 English ⚖ 467 KB

Aluminum-induced crystallization of amor

Aluminum-induced crystallization of amorphous silicon

✍ S Gall; M Muske; I Sieber; O Nast; W Fuhs 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 133 KB

Polycrystalline silicon germanium thin f

Polycrystalline silicon germanium thin films prepared by aluminum-induced crystallization

✍ Iwasa, Takehiro ;Kaneko, Tetsuya ;Nakamura, Isao ;Isomura, Masao 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 574 KB

## Abstract The aluminum‐induced crystallization (AIC) of amorphous silicon germanium (a‐SiGe) was investigated in bilayer structure of aluminum (Al) and a‐SiGe at the eutectic temperature of Al–Ge system (420 °C) or higher temperature. Due to energy dispersive X‐ray spectroscopy (EDX) measurements