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Detection of nitrogen incorporation in nm-thin HfO2 layers on (1 0 0)Si by electron spin resonance

✍ Scribed by A. Stesmans; V.V. Afanas’ev; F. Chen; S.A. Campbell

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 228 KB
Volume: 7
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2004.09.091

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Detection of nitrogen incorporation in nm-thin HfO2 layers on (1&#xa0;0&#xa0;0)Si by electron spin resonance

Detection of nitrogen incorporation in nm-thin HfO2 layers on (1 0 0)Si by electron spin resonance