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Effect of interlayer composition on passivation of (1 0 0)Si/HfO2 interface states by hydrogen

✍ Scribed by L. Truong; Y.G. Fedorenko; V. Afanas’ev; A. Stesmans


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
166 KB
Volume
118
Category
Article
ISSN
0921-5107

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