𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Detection of metallic trace impurities on Si(100) surfaces with total reflection X-ray fluorescence (TXRF)

✍ Scribed by V. Penka; W. Hub

Book ID
112376631
Publisher
Springer
Year
1989
Tongue
English
Weight
396 KB
Volume
333
Category
Article
ISSN
1618-2650

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Detection of surface impurities on Si wa
Detection of surface impurities on Si wafers using total reflection x-ray photoelectron spectroscopy
✍ Iijima, Yoshitoki; Miyoshi, Kousuke; Saito, Shuichi πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 400 KB πŸ‘ 2 views

Total reΓ‘ection x-ray photoelectron spectroscopy (TRXPS) has been applied to measure contamination elements on Si wafers using an x-ray photoelectron spectrometer. The radiated x-rays are limited by a slit placed in front of the Al anode, and the grazing angle is made shallow by using a crystal to m