A complete picture of breakdown is presented and compared with a full set of experiments. First, an analytical model for the breakdown statistics is proposed. This model is shown to have essentially the same predictive power as the percolation approach. Second, a hydrogen-based quantitative picture
Detailed study and projection of hard breakdown evolution in ultra-thin gate oxides
β Scribed by J.S. Suehle; B. Zhu; Y. Chen; J.B. Bernstein
- Book ID
- 108210511
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 578 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0026-2714
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