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Detailed investigation of the effects of La and Al content on the electrical characteristics and reliability properties of La–Al–O gate dielectrics

✍ Scribed by Masamichi Suzuki; Masato Koyama; Atsuhiro Kinoshita

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
527 KB
Volume
50
Category
Article
ISSN
0026-2714

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