𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Design of an atomic force microscope and first results

✍ Scribed by H. Heinzelmann; P. Grütter; E. Meyer; H. Hidber; L. Rosenthaler; M. Ringger; H.-J. Güntherodt


Publisher
Elsevier Science
Year
1987
Weight
47 KB
Volume
189-190
Category
Article
ISSN
0167-2584

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


SiO2and Si nanoscale patterning with an
✍ B. Klehn; U. Kunze 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 295 KB

The use of an atomic force microscope (AFM) as a nanolithographic tool is demonstrated. A photoresist layer several nanometre thin is indented by the vibrating AFM tip, where software control switches the tapping force from the imaging to the patterning mode. The resist pattern is transferred into a