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Design-dependent gauge factors of highly doped n-type 4H-SiC piezoresistors

✍ Scribed by Akiyama, T; Briand, D; de Rooij, N F

Book ID: 124071197
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 483 KB
Volume: 22
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/22/8/085034

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