Iron, cobalt and manganese sulphide thin films have been prepared by CVD using Fe[(C 2 H 5 ) 2 NCS 2 ] 3 , Co[(C 2 H 5 ) 2 NCS 2 ] 3 and MnPhen [(C 2 H 5 ) 2 NCS 2 ] 2 complex compounds (CCs) as precursors. The respective oxides were prepared by annealing the sulphide thin films in the presence of o
β¦ LIBER β¦
Design and synthesis of CVD precursors to thin film ceramic materials
β Scribed by L.V. Interrante; B. Han; J.B. Hudson; C. Whitmarsh
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 294 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0169-4332
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