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Synthesis and Characterization of Tris(β-ketoiminato)ruthenium(III) Complexes: Potential Precursors for CVD of Ru and RuO2 Thin Films

✍ Scribed by T.-Y. Chou; Y.-H. Lai; Y.-L. Chen; Y. Chi; K.R. Prasad; A.J. Carty; S.-M. Peng; G.-H. Lee

Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
772 KB
Volume
10
Category
Article
ISSN
0948-1907

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