๐”– Bobbio Scriptorium
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Design and simulation of high aspect ratio motion sensors

โœ Scribed by L. Yao; E. Chowanietz; M. McCormick; A. Lees


Publisher
Springer-Verlag
Year
1996
Tongue
English
Weight
384 KB
Volume
2
Category
Article
ISSN
0946-7076

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## Abstract Capillaryโ€forceโ€induced collapse of highโ€aspectโ€ratio (HAR) microโ€ and nanostructures is common in the evaporationโ€“drying process and a number of applications based on the collapse have been proposed. However, the collapse of small HAR structures is usually uncontrollable, which has pre