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A new micromachined sensor system for tactile measurements of high aspect ratio microstructures

✍ Scribed by M. Balke; E. Peiner; L. Doering

Publisher: Springer-Verlag
Year: 2007
Tongue: English
Weight: 465 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0452-8

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