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Design and Simulation of Film Bulk Acoustic Wave Resonator in Ku-Band

โœ Scribed by Mohd Nor, Nurul Izza; Shah, Kriyang; Singh, Jugdutt; Sauli, Zaliman

Book ID
120645506
Publisher
Trans Tech Publications, Ltd.
Year
2013
Tongue
English
Weight
507 KB
Volume
662
Category
Article
ISSN
1662-8958

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Design and fabrication of integrated fil
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## Abstract In this paper, fully integrated film bulk acoustic resonators (FBARs) and filter have been designed, fabricated, and characterized by using silicon bulk micromachining technology. The fabricated resonator is comprised of aluminum nitride (AlN) piezoelectric material sandwiched by two mo