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Orientation fluctuation trend of Pt and ZnO layers in film bulk acoustic resonator

✍ Scribed by Zhi Yan; Yi Ming Mi; Zhi Tang Song; Wei Li Liu; Hong Ji; Song Lin Feng

Book ID
103885138
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
523 KB
Volume
400
Category
Article
ISSN
0921-4526

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