The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

✍ Scribed by Xiaotun Qiu; Ziyu Wang; Jie Zhu; Oiler, J.; Rui Tang; Cunjiang Yu; Hongyu Yu

• Book ID: 119823802
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 407 KB
• Volume: 57
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/tuffc.2010.1637