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Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs

โœ Scribed by Jin-Bock Lee; Jun-Phil Jung; Myung-Ho Lee; Jin-Seok Park

Book ID
113936418
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
816 KB
Volume
447-448
Category
Article
ISSN
0040-6090

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This paper deals with experimental design applied to response surface methodology (RSM) in order to determine the influence of the discharge conditions on preferred c-axis orientation of sputtered AlN thin films. The thin films have been deposited by DC reactive magnetron sputtering on Si (1 0 0) su