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Design and optimization of planar structure micro-hotplate

✍ Scribed by Zili Zhang; Chenbo Yin; Chunmin Tao; Bin Zhu; Ningning Dong

Book ID
104090213
Publisher
Elsevier
Year
2011
Tongue
English
Weight
540 KB
Volume
12
Category
Article
ISSN
1877-7058

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✦ Synopsis

A new planar structure micro-hotplate is fabricated to simplify the manufacturing process of micro gas sensor and shows similar power consumption with the conventional stack one. Two new types of planar structure microhotplates are designed to uniform the temperature distribution on the sensitive film deposited on it and decrease the power consumption. As the result of the thermal analysis, the suspended planar structure is the most promising structure because of the homogeneous temperature distribution and the lower power consumption.

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