Thermal optimization of micro-hotplates that have a silicon island

✍ Scribed by Briand, Danick; Heimgartner, Stephan; Gr tillat, Marc-Alexis; Schoot, Bart van der; Rooij, Nicolaas F de

• Book ID: 126911323
• Publisher: Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 284 KB
• Volume: 12
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/12/6/330