Design and optimization of planar struct
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Zili Zhang; Chenbo Yin; Chunmin Tao; Bin Zhu; Ningning Dong
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Article
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2011
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Elsevier
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English
โ 540 KB
A new planar structure micro-hotplate is fabricated to simplify the manufacturing process of micro gas sensor and shows similar power consumption with the conventional stack one. Two new types of planar structure microhotplates are designed to uniform the temperature distribution on the sensitive fi