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Design and fabrication of PZT microcantilevers with freestanding structure

โœ Scribed by Ziping Cao; Jinya Zhang; Hiroki Kuwano

Book ID
106186136
Publisher
Springer-Verlag
Year
2011
Tongue
English
Weight
382 KB
Volume
17
Category
Article
ISSN
0946-7076

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An in-plane resonant bimetal microcantilever based on thermal actuation mechanism was developed utilizing the photolithography technique. The microcantilever structure consists of a platform, a long narrow anchor, and a U-shape actuation loop. Niobium and gold are used as materials for fabrication o