✦ LIBER ✦
Design and fabrication of microcantilever probe integrated with microplasma reactor for maskless scanning plasma etching
✍ Scribed by Li Wen; Hai Wang; Liwen He; Qiuping Zhang; Weiwei Xiang; Jiaru Chu
- Book ID
- 113905009
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 889 KB
- Volume
- 169
- Category
- Article
- ISSN
- 0924-4247
No coin nor oath required. For personal study only.