Design, fabrication and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor

✍ Scribed by Zhou, Youzheng; Wang, Zheyao; Wang, Chaonan; Ruan, Wenzhou; Liu, Litian

• Book ID: 125479177
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 884 KB
• Volume: 19
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/19/6/065026