𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm

✍ Scribed by Cheng, Rongjun; Zhao, Yulong; Li, Cun; Tian, Bian; Yu, Zhongliang; Liu, Keyin

Book ID
121511833
Publisher
Springer-Verlag
Year
2014
Tongue
English
Weight
952 KB
Volume
21
Category
Article
ISSN
0946-7076

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Design and fabrication of resonating AT-
Design and fabrication of resonating AT-quartz diaphragms as pressure transducers
✍ H.-J. Wagner; W. Hartig; S. BΓΌttgenbach πŸ“‚ Article πŸ“… 1994 πŸ› Elsevier Science 🌐 English βš– 441 KB

A novel design of a quartz-diaphragm pressure transducer, reahzed Hrlth an AT crystal cut, IS described The resonator consists of a bossed and grooved diaphragm structure monohthlcally attached to a quartz frame Fmlteelement modellmg has been carned out to determine the dynarmc behavlour of the stru

Fabrication and characterization of a sh
Fabrication and characterization of a shear mode AlN solidly mounted resonator-silicone microfluidic system for in-liquid sensor applications
✍ Gunjana Sharma; Lina Liljeholm; Johannes Enlund; Johan BjurstrΓΆm; Ilia Katardjie πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 684 KB

A shear mode AlN solidly mounted resonator (SMR) microfluidic sensor system was fabricated and characterized. The AlN SMR fabrication process is fully IC compatible and uses reactive sputtering to deposit piezoelectric AlN thin films with a non-zero mean inclination of the c-axis, which allows in-li