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Design and fabrication of a low-cost microengineered silicon pressure sensor with linearised output

✍ Scribed by Beeby, S.P.; Stuttle, M.; White, N.M.

Book ID: 114457052
Publisher: The Institution of Electrical Engineers
Year: 2000
Tongue: English
Weight: 381 KB
Volume: 147
Category: Article
ISSN: 1350-2344
DOI: 10.1049/ip-smt:20000355

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