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Analysis and design of a four-terminal silicon pressure sensor at the centre of a diaphragm

✍ Scribed by Bao Minhang; Yan Wang

Publisher: Elsevier Science
Year: 1987
Weight: 473 KB
Volume: 12
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(87)87005-1

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