✍ Scribed by H.-J. Wagner; W. Hartig; S. Büttgenbach
No coin nor oath required. For personal study only.
A novel design of a quartz-diaphragm pressure transducer, reahzed Hrlth an AT crystal cut, IS described The resonator consists of a bossed and grooved diaphragm structure monohthlcally attached to a quartz frame Fmlteelement modellmg has been carned out to determine the dynarmc behavlour of the structure and the electrode configurations for exntmg a low-frequency bendmg resonance mode The selechwty of this vlbratlon mode due to a barometnc pressure change mamfests itself as a very sensltwe and stable frequency-sluft response Several diaphragm structures and electrode layouts have been fabncated employmg a specmlly developed low-cost batchmanufacturmg method combmed wth a laser process The dynamic properties of the resonatmg diaphragms are experimentally charactellzed by optical measurements In hybrid packagmg, the structures are used as oscdlatordriven sensor prototypes
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