✦ LIBER ✦

Depth resolved study of impurity sites in low energy ion implanted As in Si

✍ Scribed by dAcapito, Francesco; Milita, Silvia; Satta, Alessandra; Colombo, Luciano

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The atomic site of as implanted in Si at

✍ F. d’Acapito; C. Maurizio; M. Malvestuto 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 111 KB

Depth profiles of metal ions implanted i

✍ A. L. Stepanov; V. A. Zhikharev; I. B. Khaibullin 📂 Article 📅 2001 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 359 KB

In-depth concentration distribution of A

✍ D.W. Oh; S.K. Oh; H.J. Kang; H.I. Lee; D.W. Moon 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 153 KB

Temperature-programmed evolution of low-

✍ Mark R Tesauro; Grant Underwood; B.K Kellerman; Alan Campion 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 382 KB

Depth distribution of defects and impuri

✍ Burenkov, A. F. ;Varychenko, V. S. ;Zaitsev, A. M. ;Komarov, F. F. ;Konoplyanik, 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 505 KB

Transient enhanced diffusion and defect

✍ Krishnamoorthy, V.; Moller, K.; Jones, K. S.; Venables, D.; Jackson, J.; Rubin, 📂 Article 📅 1998 🏛 American Institute of Physics 🌐 English ⚖ 565 KB