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Depth resolution in Auger depth profile analysis of aluminum metallization in microelectronics: The effect of crystalline texture

✍ Scribed by W. Pamler; K. Wangemann; S. Kampermann; W. Hösler

Book ID
113280963
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
713 KB
Volume
51
Category
Article
ISSN
0168-583X

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