7408. Depth resolution in Auger depth profile analysis of aluminum metallization in microelectronics: the effect of crystalline texture: W Palmer et al, Nucl Instrum Meth Phys Res, B51, 1990, 34–40

• Book ID: 103471048
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 150 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91215-a