Determination of the interface region in multilayerSi/Moby Auger depth profile and factor analysis

✍ Scribed by T. Morohashi; T. Hoshi; H. Nikaido; M. Kudo

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 422 KB
• Volume: 100-101
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(96)00262-0