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Depth profiling studies of multilayer films with a C60+ ion source

✍ Scribed by A.G. Sostarecz; S. Sun; C. Szakal; A. Wucher; N. Winograd


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
117 KB
Volume
231-232
Category
Article
ISSN
0169-4332

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