✦ LIBER ✦
Investigation of an ion-milled Si/Cr multilayer using micro-RBS, ellipsometry and AES depth profiling techniques
✍ Scribed by A. Simon; A. Sulyok; M. Novák; G. Juhász; T. Lohner; M. Fried; A. Barna; R. Huszank; M. Menyhárd
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 553 KB
- Volume
- 267
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.