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Depth profiling of thin films using a Grimm-type glow discharge lamp

✍ Scribed by A Bengtson; L Danielsson


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
252 KB
Volume
124
Category
Article
ISSN
0040-6090

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A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation