Anodic alumina Γlms with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth proΓling analysis to quantify depth resolution. It is evident that the depth resolution of GDOES is excellent and is comparable wi
β¦ LIBER β¦
Depth profiling of thin films using a Grimm-type glow discharge lamp
β Scribed by A Bengtson; L Danielsson
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 252 KB
- Volume
- 124
- Category
- Article
- ISSN
- 0040-6090
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