Photoenhanced deposition of silicon oxide thin films using a novel windowless internal nitrogen discharge lamp

✍ Scribed by S. D. Baker; W. I. Milne; P. A. Robertson

• Publisher: Springer
• Year: 1988
• Tongue: English
• Weight: 482 KB
• Volume: 46
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf01141589