We have developed a new type of polyatomic ion beam system using liquid organic materials such as octane and ethanol, which consists of a capillary type of nozzle, an ionizer, a mass-separator and a substrate holder. Ion current extracted after ionization was 430 lA for octane and 200 lA for ethanol
Depth profiling of organic materials using improved ion beam conditions
β Scribed by H.-G. Cramer; T. Grehl; F. Kollmer; R. Moellers; E. Niehuis; D. Rading
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 584 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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