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Depth profiling of high-energy hydrogen-implanted 6H-SiC

✍ Scribed by Brink, Daniel J. ;Maurice, Thibaut ;Blanque, Servane ;Kunert, H. ;Camassel, Jean ;Pascual, Jordi


Book ID
115351276
Publisher
The Optical Society
Year
2004
Tongue
English
Weight
174 KB
Volume
43
Category
Article
ISSN
1559-128X

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