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Depth profiles of shallow implanted layers by soft ion sputtering and total-reflection X-ray fluorescence

✍ Scribed by H. Krzyżanowska; A. von Bohlen; R. Klockenkämper

Book ID: 108261482
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 137 KB
Volume: 58
Category: Article
ISSN: 0584-8547
DOI: 10.1016/j.sab.2003.05.002

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