✦ LIBER ✦
Nondestructive dose determination and depth profiling of arsenic ultrashallow junctions with total reflection X-ray fluorescence analysis compared to dynamic secondary ion mass spectrometry
✍ Scribed by G. Pepponi; C. Streli; P. Wobrauschek; N. Zoeger; K. Luening; P. Pianetta; D. Giubertoni; M. Barozzi; M. Bersani
- Book ID
- 108261510
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 428 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0584-8547
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