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Depth profiles of refractive index in thermally grown and LPCVD oxide films on silicon

โœ Scribed by B. M. Ayupov; S. F. Devyatova; V. G. Erkov; L. A. Semenova


Book ID
110214345
Publisher
Springer
Year
2008
Tongue
English
Weight
202 KB
Volume
37
Category
Article
ISSN
1063-7397

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