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Depth profile of the microhardness in proton-implanted GaP

✍ Scribed by H. Neumann; C. Ascheron


Publisher
Springer
Year
1989
Tongue
English
Weight
225 KB
Volume
8
Category
Article
ISSN
0261-8028

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Characterization of the Microhardness of
✍ Doz. Dr. sc. C. Ascheron; Doz. Dr. sc. H. Neumann; Prof. Dr. sc. G. KΓΌhn πŸ“‚ Article πŸ“… 1991 πŸ› John Wiley and Sons 🌐 English βš– 446 KB πŸ‘ 1 views

## Characterization of the Microhardness of Ion-implanted GaP Dedicated to Professor E. BUTTER in honour of his 60th birthday Implantation induced changes of the microhardness are studied in GaP single crystals which were bombarded with ions in the range of mass numbers M = 1-40. It IS observed th