Depth profile analysis of thin passive films on stainless steel by glow discharge optical emission spectroscopy
✍ Scribed by M. Uemura; T. Yamamoto; K. Fushimi; Y. Aoki; K. Shimizu; H. Habazaki
- Book ID
- 116385143
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 242 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0010-938X
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Anodic alumina Ðlms with precisely known distributions of incorporated species have been used as standards for glow discharge optical emission spectrometry (GDOES) depth proÐling analysis to quantify depth resolution. It is evident that the depth resolution of GDOES is excellent and is comparable wi
## Abstract Depth profiles of nickel thin films on silicon obtained with a Grimm glow discharge lamp operating at various conditions were compared. The best conditions for the profile analysis are: high argon pressure, high discharge current and low discharge voltage. The signal response at the int