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Deposition of ultrathin silicon dioxide film from pyrolysis of tetraethoxysilane

โœ Scribed by Ong, T. P.; Tobin, Philip; Mele, Thomas


Book ID
120085211
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
576 KB
Volume
77
Category
Article
ISSN
0021-8979

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