Deposition of tetramethylsilane on the glass by plasma-enhanced chemical vapor deposition and atmospheric pressure plasma treatment

✍ Scribed by Chen, Ko-Shao; Liao, Shu-Chuan; Tsao, Shao-Hsuan; Inagaki, Norihiro; Wu, Hsin-Ming; Chou, Chin-Yen; Chen, Wei-Yu

• Book ID: 122968713
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 903 KB
• Volume: 228
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.09.032