Chemical Vapor Deposition Enhanced by Atmospheric Pressure Non-thermal Non-equilibrium Plasmas

✍ Scribed by S. E. Alexandrov; M. L. Hitchman

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 532 KB
• Volume: 11
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200500026