Nanoparticle formation in microchannel glass by plasma enhanced chemical vapor deposition

✍ Scribed by D. N. Mcilroy; J. Huso; Y. Kranov; J. Marchinek; C. Ebert; S. Moore; E. Marji; R. Gandy; Y. Hong; M. Grant Norton; E. Cavalieri; R. Benz; B. L. Justus; A. Rosenberg

• Book ID: 124087432
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 765 KB
• Volume: 93
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1564881