✦ LIBER ✦

Deposition of silicon nitride thin films by reaction of SiH4in a nitrogen post-discharge

✍ Scribed by J. L. Jauberteau; D. Conte; M. I. Baraton; P. Quintard; J. Aubreton; A. Catherinot

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Microwave glow discharge deposition of t

✍ M. Ružička 📂 Article 📅 1974 🏛 Springer 🌐 English ⚖ 184 KB

Spectroscopic study of a D.C. discharge

✍ J. L. Jauberteau; D. Duchesne; C. Girault; J. Aubreton; A. Catherinot 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 674 KB

Nitrogen profiles of thin sputtered PVD

✍ A Markwitz; H Baumann; EF Krimmel; M Rose; K Bethge; P Misaelides; S Logothetidi 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 322 KB

Properties of silicon nitride films prep

✍ Hideo Watanabe; Kazuhisa Katoh; Shin-Ichi Imagi 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 370 KB

Studies on deposition parameters of sili

✍ K. R. Lee; K. B. Sundaram; D. C. Malocha 📂 Article 📅 1994 🏛 Springer US 🌐 English ⚖ 396 KB

Photoenhanced deposition of silicon oxid

✍ S. D. Baker; W. I. Milne; P. A. Robertson 📂 Article 📅 1988 🏛 Springer 🌐 English ⚖ 482 KB